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Type 8713 – Mass Flow Controller for Gases (MFC)

Type Description

The mass flow controller (MFC) type 8713 is suited for regulating the mass flow of gases over a big flow range. The thermal MEMS sensor is located directly in the gas stream and therefore reaches very fast response times. A direct-acting proportional valve from Bürkert guarantees a high sensitivity. The integrated PI controller ensures outstanding control characteristics of the MFC. Type 8713 can optionally be calibrated for two different gases; the user can switch between these two gases. The communication with master devices is fully digital, therefore no further analog/digital conversions are needed. The mass flow controller type 8713 fits for various applications, like e.g. burner controls, heat treatment, material coatings, bio reactors, fuel cell technology or test benches.

  • Nominal flow ranges from 0.010 l/min to 80 l/min
  • High accuracy and repeatability
  • Very fast settling times
  • Digital communication via RS485
  • Compact version
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